469858

Tetrakis(dimethylamido)titanium(IV)

99.999% trace metals basis

• 동의어(들): TDMAT, Tetrakis(dimethylamino)titanium(IV)
• Linear Formula: [(CH₃)₂N]₄Ti
• CAS Number: 3275-24-9
• Molecular Weight: 224.17
• EC Number: 221-904-3
• MDL number: MFCD00014861
• UNSPSC 코드: 12352103
• PubChem Substance ID: 24870618
• NACRES: NA.23

속성

• Quality Level: 200
• 분석: 99.999% trace metals basis
• 양식: liquid
• 반응 적합성: core: titanium
• bp: 50 °C/0.5 mmHg (lit.)
• density: 0.947 g/mL at 25 °C (lit.)
• SMILES string: CN(C)[Ti](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI key: MNWRORMXBIWXCI-UHFFFAOYSA-N

설명

일반 설명

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애플리케이션

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

안전성 정보

• 픽토그램: GHS02,GHS05
• 신호어: Danger
• 유해 및 위험 성명서: H225,H260,H314
• 예방조치 성명서: P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• Hazard Classifications: Flam. Liq. 2 - Skin Corr. 1B - Water-react 1
• 보충제 위험성: EUH014
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point (°F): -22.0 °F - closed cup
• Flash Point (°C): -30 °C - closed cup
• 개인 보호 장비: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter