463094

Trimethylboron

electronic grade, ≥98.35%

• Synonym(s): Trimethylborane
• Linear Formula: B(CH₃)₃
• CAS Number: 593-90-8
• Molecular Weight: 55.91
• EC Number: 209-816-3
• MDL number: MFCD00058727
• UNSPSC Code: 12352300
• PubChem Substance ID: 24869894

Properties

• grade: electronic grade
• Assay: ≥98.35%
• form: gas
• reaction suitability: core: boron
• impurities: <1 ppm Oxygen (O₂); <1.5% Dimethylethylborane [B(CH₃)₂C₂H₅]; <10 ppm Carbon dioxide (CO₂); <10 ppm Nitrogen (N₂); <100 ppm Methane (CH₄); <1000 ppm Trimethylamine (TMA); <50 ppm Hydrogen (H₂)
• bp: −20.2 °C (lit.)
• mp: −161.5 °C (lit.)
• SMILES string: CB(C)C
• InChI: 1S/C3H9B/c1-4(2)3/h1-3H3
• InChI key: WXRGABKACDFXMG-UHFFFAOYSA-N

Description

Application

Precursor to boron carbide thin films by chemical vapor deposition (CVD).

Trimethylboron is used as an organometallic precursor for the CVD of boron-carbon containing films and as a boron source in the deposition of borophosphosilicate glass (BPSG).

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

Safety Information

• Pictograms: GHS04,GHS05
• Signal Word: Danger
• Hazard Statements: H280,H314
• Precautionary Statements: P260 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338 - P410 + P403
• Hazard Classifications: Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B
• Storage Class Code: 2A - Gases
• WGK: WGK 1
• Flash Point(F): Not applicable
• Flash Point(C): Not applicable
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves