463043

Disilane

electronic grade

• Synonym(s): Disilicane, Disilicoethane, Disilicon hexahydride, Silicoethane, Silicon hydride (Si₂ H₆ )
• Linear Formula: Si₂H₆
• CAS Number: 1590-87-0
• Molecular Weight: 62.22
• EC Number: 216-466-5
• MDL number: MFCD00054678
• UNSPSC Code: 12352103
• PubChem Substance ID: 24869889
• NACRES: NA.23

Properties

• grade: electronic grade
• Quality Level: 100
• assay: ≥99.998% chemical purity basis
• form: gas
• impurities: ≤50 ppm Higher silanes; <0.2 ppm Chlorosilanes; <1 ppm Argon (Ar) + Oxygen (O₂); <1 ppm Carbon dioxide (CO₂); <1 ppm Nitrogen (N₂); <1 ppm THC; <1 ppm Water; <5 ppm Siloxanes
• bp: −14.5 °C (lit.)
• mp: −132.6 °C (lit.)
• transition temp: critical temperature 150.9 °C
• SMILES string: [SiH3][SiH3]
• InChI: 1S/H6Si2/c1-2/h1-2H3
• InChI key: PZPGRFITIJYNEJ-UHFFFAOYSA-N

Description

General description

Atomic number of base material: 14 Silicon

Application

Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

Features and Benefits

Disilane is used for the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics via rapid low-temperature chemical vapor depsition (LTCVD). Disilane is also used in the epitaxial growth of SiGe films by molecular beam epitaxy (MBE) in conjunction with solid sources of germanium. Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

Safety Information

• pictograms: GHS02,GHS04,GHS08,GHS07
• signalword: Danger
• hcodes: H221,H280,H312,H315,H319,H334,H335
• pcodes: P210 - P280 - P302 + P352 + P312 - P305 + P351 + P338 - P403 + P233 - P410 + P403
• Hazard Classifications: Acute Tox. 4 Dermal - Eye Irrit. 2 - Flam. Gas 1B - Press. Gas Liquefied gas - Resp. Sens. 1 - Skin Irrit. 2 - STOT SE 3
• target_organs: Respiratory system
• Storage Class: 2A - Gases
• wgk_germany: WGK 3
• flash_point_f: <50.0 °F - closed cup
• flash_point_c: < 10 °C - closed cup
• ppe: Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)